硬核中国上新了 | 湖北九峰山实验室：给芯片穿上“性能铠甲”
<p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 0.5em 0px; padding: 0px; word-break: break-word; text-align: center; font-size: 18px; line-height: 36px; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);"><iframe src="https://app.cjyun.org/video/player/index?vid=762074&thumb=https%3A%2F%2Fimg.cjyun.org%2Fa%2F10008%2F202605%2Fe642aba45b44940e54565b748e334e9c.jpg&sid=10008&next=&autoStart=0&type=&customid=983&width=1920&height=1080" frameborder="0" width="100%" allowfullscreen="allowfullscreen" style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; border-width: 0px; border-style: none; max-width: unset; max-height: unset; height: calc(-16.875px + 56.25vw);"><br style="box-sizing: border-box; -webkit-tap-highlight-color: transparent;"/></iframe></p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);">近日，湖北九峰山实验室携手国产设备企业，率先在8英寸晶圆平台实现原子层沉积金属钼量产制备，如同为芯片披上一层高性能防护“铠甲”，让芯片运行更高速、更稳定。<br style="box-sizing: border-box; -webkit-tap-highlight-color: transparent;"/></p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);">制造芯片如同搭积木，需逐层沉积金属薄膜与绝缘材料，随着芯片制程不断微缩，传统金属材料在纳米尺度下性能受限，易出现发热、失效等问题。而金属钼具备优异的耐高温特性与导电、导热能力，可有效提升信号传输效率、降低能耗。但如何在8英寸晶圆上，均匀、稳定地镀制钼薄膜，一直是国内技术空白。九峰实验室的最新技术，就是在这一领域的新突破。他们联合国产设备厂商从零攻坚，大量试验，找到了最优的技术方案。</p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);"><strong style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; font-weight: bold;">九峰山实验室工艺中心技术开发部部长 向诗力：</strong>最难的就是协同优化这个过程，单次做一次实验可能就是五六十个小时，只能获得一笔数据。今天做10组不行，明天再接着干10组，反反复复地去做实验，持续了有个半年的时间，把最优的工艺参数筛选出来。</p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);">团队累计完成近500批次实验，成功稳定制备出均匀度、覆盖性、致密性俱佳的金属钼薄膜。该工艺可在400℃环境下完成生产，不仅能兼容现有CMOS生产线，还省去中间过渡层工序，大幅降低落地门槛与生产成本，同时全程适配国产设备，实现装备、工艺双自主可控。</p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);"><strong style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; font-weight: bold;">九峰山实验室工艺中心总经理 柳俊：</strong>钼用这个金属沉积之后，它（芯片）的传输的速度会有很大的提升，成本会有很大的降低。和国产的相关设备厂商联合，完成了从装备一直到最终工艺的突破。</p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);">目前，这项创新工艺各项关键指标均已达到量产标准，可应用于国产存储芯片、逻辑芯片等先进制程研发。</p><p style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; margin: 1em 0px; padding: 0px; word-break: break-word; text-align: justify; text-indent: 2em; font-size: 18px; line-height: 2; color: rgb(51, 51, 51); font-family: -apple-system, BlinkMacSystemFont, Helvetica Neue, Helvetica, Segoe UI, Arial, Roboto, PingFang SC, miui, Hiragino Sans GB, Microsoft Yahei, sans-serif; white-space: normal; background-color: rgb(255, 255, 255);"><strong style="box-sizing: border-box; -webkit-tap-highlight-color: transparent; font-weight: bold;">九峰山实验室工艺中心总经理 柳俊：</strong>运用了这个技术，手机可能会用起来更流畅，电的消耗可能会更小。今年年底会完成可靠性测试相关的流程，明年开始中试或者小批量生产，进一步推动整个国产的工艺平台的自主可控。</p><p><br/></p><section style="max-width: 100%; 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